Design and Simulation of a Fluidic Micro-Bio-Sensor Based on Resonator Array

In this paper, a fluidic biosensor with possibility to fabricate by Micro-Electro-Mechanical Systems (MEMS) technology is proposed for biomedical mass detection and lab-on-chip applications. This is designed by electromechanical coupling of harmonic micromechanical resonators with harmonic springers as a mechanical resonator array. It can disperse mechanical wave along the array by electrostatic method using interdigitate capacitors as actuators and sensors. It has some vital advantages like: low cost fabrication method, low fluidic interference damping effect, and high sensitivity with large absorbent area. In order to estimate the sensitivity of the proposed biosensor against the mass perturbation, the measurability of capacitance changes and fluidic interference damping effect, the stimulated analysis is conducted by COMSOL. It results, a suitable sensitivity and possibility to measure the biosensor outputs by available electronic instrumentations.